The electron
microprobe offers several operational modes for chemical analysis.
These are generally divided into qualitative and quantitative procedures.
The qualitative analysis capabilities are briefly listed here :
Qualitative
Analysis
Secondary
electron imaging
- provides topographic
images (surfaces, cracks, voids)
- magnification range from 63X to 10000X
- on-line gray and false-color images
- output in binary data file and PC/Mac 256 color TIFF image file
- image processing software
Backscatter
electron imaging
- provides average
atomic number contrast images
- magnification range from 63X to 10000X
- on-line gray and false-color images
- output in binary data file and PC/Mac 256 color TIFF image file
- image processing software
Cathodo-luminescence
imaging
- provides trace
element and lattice dislocation imaging
- magnification range from 250X to 1000X (down to 63X using mosaic
imaging)
- on-line gray and false-color images
- output in binary data file and PC/Mac 256 color TIFF image file
- image processing software
Qualitative
x-ray imaging
- provides x-ray
mapping of sample surfaces for up to 5 elements (WDS)
- provides x-ray mapping of sample surfaces for up to 16 elements
(EDS)
- magnification range from 400X to 10000X (down to 63X using mosaic
imaging)
- on-line gray and false-color images
- output in binary data file and PC/Mac 256 color TIFF image file
- image processing software
Wavelength
spectrometer scanning
- simultaneous
wavelength scan acquisition on 5 spectrometers
- on-line database containing over 12,000 entries for peak identification
- publication quality graphical output
Quantitative
Analysis
Quantitative
analysis generally involves the use of calibration standards and
correction for deadtime, background, drift, matrix and interference
effects in both the standards and the unknown sample. The following
quantitative analysis capabilities are available :
Quantitative
element analysis
- simultaneous
analysis of 5 elements up to a maximum of 32 elements
- large set of NIST, USNM, USGS, MAS and internal certified analytical
standards
- correction of deadtime, background, drift, matrix and interference
effects for fully quantitative analysis
- on-line and off-line analysis software includes the CITZAF matrix
correction library by John Armstrong (NIST)
- full automation for unknown and standard data acquisition
- results in elemental and oxide weight percent, mole percent, formula
atoms and mineral end-members
- statistics on detection limits, sample homogeneity, and analytical
sensitivity
- draft and publication quality hard copy and ASCII file output
Quantitative
x-ray imaging
- software provides
automatic acquisition of rectangular and irregular polygon areas
for up to 10,000 analyses
- large area mapping up to 25mm and larger
- output in numerical ASCII file and publication quality contour
plot, 3-D surface plot, gray or false color TIFF
- image processing software
Semi-quantitative
wavelength shift scanning
- provides semi-quantitative
analysis of oxidation states for some elements
- published procedures and results for Fe and S oxidation states
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