Electron Microprobe (EPMA)

The Department of Earth and Planetary Science Cameca SX-51 electron microprobe is a customized analytical instrument with 5 wavelength dispersive spectrometers (WDS), a high resolution quantitative energy dispersive spectrometer (EDS) system, along with backscatter electron (BSE), secondary electron (SE), absorbed current (ABS) and cathodo-luminescence (CL) imaging in addition to both reflected and transmitted light viewing. X-ray mapping and analysis automation using both beam and stage scanning is available for ultra-low magnification imaging. The EDS system includes both a beryllium (Be) and atmospheric thin.

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